Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne | 2018-07-31 |