Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002746 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi, Zhigang Chen, John Holland | 2018-06-19 |