Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161042 | Apparatus for changing area ratio in a plasma processing system | — | 2018-12-25 |
| 10157730 | Control of impedance of RF delivery path | Alexei Marakhtanov, Ken Lucchesi, Luc Albarede | 2018-12-18 |
| 10147618 | Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same | — | 2018-12-04 |
| 10103010 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-10-16 |
| 10032604 | Remote plasma and electron beam generation system for a plasma reactor | — | 2018-07-24 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-04-17 |
| 9928995 | Methods for preventing plasma un-confinement events in a plasma processing chamber | Andreas Fischer | 2018-03-27 |
| 9911578 | Small plasma chamber systems and methods | Richard A. Gottscho, Mukund Srinivasan | 2018-03-06 |
| 9899228 | Showerhead electrode assemblies for plasma processing apparatuses | Tom Stevenson | 2018-02-20 |
| 9881772 | Multi-radiofrequency impedance control for plasma uniformity tuning | Alexei Marakhatanov | 2018-01-30 |