Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103010 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Denis M. Koosau, James Rogers | 2018-10-16 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Denis M. Koosau, James Rogers | 2018-04-17 |