Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109464 | Minimization of ring erosion during plasma processes | Olivier Joubert, Vedapuram S. Achutharaman | 2018-10-23 |
| 10103010 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-10-16 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-04-17 |