Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128090 | RF impedance model based fault detection | John C. Valcore, Jr., Nicholas Webb, Peter Muraoka | 2018-11-13 |
| 10103010 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau | 2018-10-16 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau | 2018-04-17 |