| 10163605 |
Computation of statistics for statistical data decimation |
Andrew Fong |
2018-12-25 |
| 10157729 |
Soft pulsing |
— |
2018-12-18 |
| 10128090 |
RF impedance model based fault detection |
James Rogers, Nicholas Webb, Peter Muraoka |
2018-11-13 |
| 10103771 |
Dual push between a host computer system and an RF generator |
Tony San, Andrew Fong |
2018-10-16 |
| 10102321 |
System, method and apparatus for refining radio frequency transmission system models |
Henry Povolny |
2018-10-16 |
| 10074520 |
Adjustment of power and frequency based on three or more states |
Bradford J. Lyndaker |
2018-09-11 |
| 10032605 |
Methods and apparatus for controlling plasma in a plasma processing system |
Bradford J. Lyndaker |
2018-07-24 |
| 10020168 |
Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator |
Arthur M. Howald, Bradford J. Lyndaker |
2018-07-10 |
| 10008371 |
Determining a value of a variable on an RF transmission model |
Bradford J. Lyndaker |
2018-06-26 |
| 9997333 |
Sub-pulsing during a state |
Harmeet Singh, Bradford J. Lyndaker |
2018-06-12 |
| 9960015 |
Impedance-based adjustment of power and frequency |
Bradford J. Lyndaker |
2018-05-01 |
| 9947513 |
Edge ramping |
Bradford J. Lyndaker, Andrew Fong |
2018-04-17 |
| 9927481 |
Cable power loss determination for virtual metrology |
Arthur M. Howald |
2018-03-27 |
| 9911577 |
Arrangement for plasma processing system control based on RF voltage |
Henry Povolny |
2018-03-06 |
