Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10102321 | System, method and apparatus for refining radio frequency transmission system models | John C. Valcore, Jr. | 2018-10-16 |
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Matthew Busche, Anthony J. Ricci, Scott Stevenot | 2018-10-02 |
| 10079168 | Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2018-09-18 |
| 10014161 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2018-07-03 |
| 9911577 | Arrangement for plasma processing system control based on RF voltage | John C. Valcore, Jr. | 2018-03-06 |