Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Matthew Busche, Henry Povolny, Scott Stevenot | 2018-10-02 |
| 10079168 | Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2018-09-18 |
| 10014161 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2018-07-03 |