Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141670 | Substrate connector including a spring pin assembly for electrostatic chucks | — | 2018-11-27 |
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Matthew Busche, Anthony J. Ricci, Henry Povolny | 2018-10-02 |