| 10153136 |
Hollow RF feed with coaxial DC power feed |
Jason Augustino, John Drewery, Alex Paterson |
2018-12-11 |
| 10079168 |
Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control |
Henry Povolny, Anthony J. Ricci |
2018-09-18 |
| 10049948 |
Power switching system for ESC with array of thermal control elements |
Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more |
2018-08-14 |
| 10014161 |
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control |
Henry Povolny, Anthony J. Ricci |
2018-07-03 |
| 9997381 |
Hybrid edge ring for plasma wafer processing |
Brian McMillin, Arthur H. Sato |
2018-06-12 |
