Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997381 | Hybrid edge ring for plasma wafer processing | Arthur H. Sato, Neil Benjamin | 2018-06-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997381 | Hybrid edge ring for plasma wafer processing | Arthur H. Sato, Neil Benjamin | 2018-06-12 |