Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134570 | Radiofrequency adjustment for instability management in semiconductor processing | — | 2018-11-20 |
| 9997381 | Hybrid edge ring for plasma wafer processing | Brian McMillin, Neil Benjamin | 2018-06-12 |