Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153136 | Hollow RF feed with coaxial DC power feed | Jason Augustino, Alex Paterson, Neil Benjamin | 2018-12-11 |
| 10121641 | Large dynamic range RF voltage sensor and method for voltage mode RF bias application of plasma processing systems | Maolin Long, Alex Paterson | 2018-11-06 |
| 9934956 | Time multiplexed chemical delivery system | — | 2018-04-03 |
| 9885493 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, Jon McChesney, Alex Paterson | 2018-02-06 |