Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121641 | Large dynamic range RF voltage sensor and method for voltage mode RF bias application of plasma processing systems | John Drewery, Alex Paterson | 2018-11-06 |
| 10056231 | TCCT match circuit for plasma etch chambers | Ricky Marsh, Alex Paterson | 2018-08-21 |
| 9966236 | Powered grid for plasma chamber | Alex Paterson, Richard A. Marsh, Ying Wu | 2018-05-08 |