Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10009028 | Frequency and match tuning in one state and frequency tuning in the other state | — | 2018-06-26 |
| 9991128 | Atomic layer etching in continuous plasma | Zhongkui Tan, Yiting Zhang, Qing Xu, Qian Fu, Yoko Yamaguchi +1 more | 2018-06-05 |
| 9966236 | Powered grid for plasma chamber | Maolin Long, Alex Paterson, Richard A. Marsh | 2018-05-08 |