Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991128 | Atomic layer etching in continuous plasma | Zhongkui Tan, Ying Wu, Qing Xu, Qian Fu, Yoko Yamaguchi +1 more | 2018-06-05 |
YZ
Yiting Zhang
Overall (2018): #184,492 of 503,207Top 40%
1
Patents 2018