Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10124492 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-11-13 |
| 10062599 | Automated replacement of consumable parts using interfacing chambers | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-08-28 |
| 9978565 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson, John Holland | 2018-05-22 |
| 9885493 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Alex Paterson | 2018-02-06 |