Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899228 | Showerhead electrode assemblies for plasma processing apparatuses | Rajinder Dhindsa | 2018-02-20 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, John Daugherty, John Michael Kerns +1 more | 2018-01-23 |