Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947558 | Method for conditioning silicon part | Lin Xu, Robin KOSHY, John Daugherty, Satish SRINIVASAN | 2018-04-17 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Nash W. ANDERSON, Tom Stevenson, John Daugherty, John Michael Kerns +1 more | 2018-01-23 |