Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa +1 more | 2018-04-17 |
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Harmeet Singh, Richard A. Gottscho | 2018-04-17 |