Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145014 | Film forming apparatus | Toshihisa Nozawa, Masahide Iwasaki | 2018-12-04 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9875882 | Microwave plasma processing apparatus, slot antenna, and semiconductor device | Kazushi Kaneko | 2018-01-23 |