Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109463 | Microwave automatic matcher and plasma processing apparatus | Hideo Kato, Kazunori Funazaki, Yuji Otsuka, Shinji Kawada | 2018-10-23 |
| 10074524 | Plasma processing apparatus and high frequency generator | Kazunori Funazaki, Hideo Kato | 2018-09-11 |
| 9977070 | Method for inspecting magnetron | Hideo Kato, Kazunori Funazaki, Eiji Takahashi | 2018-05-22 |
| 9875882 | Microwave plasma processing apparatus, slot antenna, and semiconductor device | Toshihiko Iwao | 2018-01-23 |