SK

Shinji Kawada

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
📍 Rifu, JP: #94 of 272 inventorsTop 35%
Overall (2018): #240,881 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10109463 Microwave automatic matcher and plasma processing apparatus Kazushi Kaneko, Hideo Kato, Kazunori Funazaki, Yuji Otsuka 2018-10-23