Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109463 | Microwave automatic matcher and plasma processing apparatus | Kazushi Kaneko, Hideo Kato, Yuji Otsuka, Shinji Kawada | 2018-10-23 |
| 10074524 | Plasma processing apparatus and high frequency generator | Kazushi Kaneko, Hideo Kato | 2018-09-11 |
| 9977070 | Method for inspecting magnetron | Kazushi Kaneko, Hideo Kato, Eiji Takahashi | 2018-05-22 |