Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978568 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Lee Chen, Merritt Funk | 2018-05-22 |
| 9966239 | Non-ambipolar plasma enhanced DC/VHF phasor | Lee Chen | 2018-05-08 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa +1 more | 2018-04-17 |