Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978568 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Lee Chen | 2018-05-22 |
| 9947515 | Microwave surface-wave plasma device | Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9941126 | Microwave plasma device | Jianping Zhao, Lee Chen | 2018-04-10 |
| 9934974 | Microwave plasma device | Jianping Zhao, Lee Chen | 2018-04-03 |
| 9881804 | Method and system for high precision etching of substrates | Jianping Zhao | 2018-01-30 |