Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145014 | Film forming apparatus | Masahide Iwasaki, Toshihiko Iwao | 2018-12-04 |
| 9960033 | Method of depositing and etching Si-containing film | — | 2018-05-01 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Zhiying Chen +1 more | 2018-04-17 |
| 9947516 | Top dielectric quartz plate and slot antenna concept | Jianping Zhao | 2018-04-17 |
| 9896762 | Method of depositing and etching film in one processing apparatus | — | 2018-02-20 |