Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2018-05-08 |