Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128076 | Inductively coupled plasma ion source with tunable radio frequency power | Noel Smith, Paul P. Tesch, Noel P. Martin, Philip J. Witham | 2018-11-13 |
| 9966231 | Direct current pulsing plasma systems | Richard A. Gottscho | 2018-05-08 |