Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121639 | Mixed mode pulsing etching in plasma processing systems | — | 2018-11-06 |
| 10096487 | Atomic layer etching of tungsten and other metals | Wenbing Yang, Samantha Tan, Jeffrey Marks, Taeseung Kim, Meihua Shen +1 more | 2018-10-09 |
| 10056264 | Atomic layer etching of GaN and other III-V materials | Wenbing Yang, Tomihito Ohba, Samantha Tan, Jeffrey Marks, Kazuo Nojiri | 2018-08-21 |
| 9984858 | ALE smoothness: in and outside semiconductor industry | Samantha Tan, Thorsten Lill, Meihua Shen, Yang Pan, Jeffrey Marks +1 more | 2018-05-29 |
| 9972504 | Atomic layer etching of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Samantha Tan, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more | 2018-05-15 |