Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103058 | Tungsten feature fill | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2018-10-16 |
| 9997405 | Feature fill with nucleation inhibition | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2018-06-12 |
| 9978610 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Waikit Fung, Liang Meng | 2018-05-22 |
| 9972504 | Atomic layer etching of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Teh-Tien Su, Wenbing Yang +2 more | 2018-05-15 |