Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978610 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Waikit Fung, Anand Chandrashekar | 2018-05-22 |
| 9882385 | System for starting large-scale power load in micro-grid | Zhiqiang Gao, Wenping Hu, Wenxin Wang, Hui Fan, Hao Jing +1 more | 2018-01-30 |