Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978610 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Liang Meng, Anand Chandrashekar | 2018-05-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978610 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Liang Meng, Anand Chandrashekar | 2018-05-22 |