Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103058 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Michal Danek, Juwen Gao, Deqi Wang | 2018-10-16 |
| 9997405 | Feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Michal Danek, Juwen Gao, Deqi Wang | 2018-06-12 |
| 9978605 | Method of forming low resistivity fluorine free tungsten film without nucleation | Hanna Bamnolker, Joshua Collins, Tomas Sadilek, Hyeong Seop Shin, Xiaolan Ba +2 more | 2018-05-22 |
| 9953984 | Tungsten for wordline applications | Michal Danek, Hanna Bamnolker, Juwen Gao | 2018-04-24 |