Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103058 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Deqi Wang | 2018-10-16 |
| 9997405 | Feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Deqi Wang | 2018-06-12 |
| 9969622 | Ternary tungsten boride nitride films and methods for forming same | Wei Lei | 2018-05-15 |
| 9953984 | Tungsten for wordline applications | Michal Danek, Hanna Bamnolker, Raashina Humayun | 2018-04-24 |