Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103056 | Methods for wet metal seed deposition for bottom up gapfill of features | Boris Volosskiy, Taeseung Kim, Praveen Nalla, Novy Tjokro, Artur Kolics | 2018-10-16 |
| 10096487 | Atomic layer etching of tungsten and other metals | Wenbing Yang, Keren Jacobs Kanarik, Jeffrey Marks, Taeseung Kim, Meihua Shen +1 more | 2018-10-09 |
| 10056264 | Atomic layer etching of GaN and other III-V materials | Wenbing Yang, Tomihito Ohba, Keren Jacobs Kanarik, Jeffrey Marks, Kazuo Nojiri | 2018-08-21 |
| 10043672 | Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask | Daniel Peter, Reza Arghavani, Yang Pan | 2018-08-07 |
| 9997357 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2018-06-12 |
| 9984858 | ALE smoothness: in and outside semiconductor industry | Keren Jacobs Kanarik, Thorsten Lill, Meihua Shen, Yang Pan, Jeffrey Marks +1 more | 2018-05-29 |
| 9972504 | Atomic layer etching of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more | 2018-05-15 |