TO

Tomihito Ohba

Lam Research: 1 patents #185 of 426Top 45%
Overall (2018): #207,985 of 503,207Top 45%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10056264 Atomic layer etching of GaN and other III-V materials Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Kazuo Nojiri 2018-08-21