Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151574 | Precision surface measurement in a vacuum | Raymond P. Conley, Mark J. Erdmann, Elina Kasman, Lahsen Assoufid, Scott J. Izzo | 2018-12-11 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Hu Kang, Ishtak Karim, Fung Suong Ou | 2018-10-09 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Frank L. Pasquale, Bart J. van Schravendijk | 2018-08-28 |
| 10037884 | Selective atomic layer deposition for gapfill using sacrificial underlayer | Fung Suong Ou, Purushottam Kumar, Adrien LaVoie, Ishtak Karim | 2018-07-31 |
| 9997357 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis, Andrew Duvall +11 more | 2018-05-15 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2018-05-08 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Hu Kang, Ishtak Karim, Purushottam Kumar, Ramesh Chandrasekharan, Adrien LaVoie | 2018-01-16 |