Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100407 | Hardware and process for film uniformity improvement | Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale, Jun Qian +5 more | 2018-10-16 |
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Adrien LaVoie, Jun Qian, Hu Kang, Ishtak Karim, Fung Suong Ou | 2018-10-09 |
| 10074543 | High dry etch rate materials for semiconductor patterning applications | Arpan Mahorowala, Ishtak Karim, Shankar Swaminathan, Adrien LaVoie | 2018-09-11 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Adrien LaVoie, Ishtak Karim, Jun Qian, Frank L. Pasquale, Bart J. van Schravendijk | 2018-08-28 |
| 10037884 | Selective atomic layer deposition for gapfill using sacrificial underlayer | Fung Suong Ou, Adrien LaVoie, Ishtak Karim, Jun Qian | 2018-07-31 |
| 9997371 | Atomic layer etch methods and hardware for patterning applications | Pulkit Agarwal, Adrien LaVoie | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Chloe Baldasseroni, Heather Landis, Andrew Duvall +11 more | 2018-05-15 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Hu Kang, Ishtak Karim, Jun Qian, Ramesh Chandrasekharan, Adrien LaVoie | 2018-01-16 |