Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157736 | Methods of encapsulation | Akhil Singhal, Joseph Hung-chi Wei, Bhadri N. Varadarajan, Kevin McLaughlin, Casey Holder +1 more | 2018-12-18 |
| 10153282 | Ultra-high vacuum transport and storage | Theodoros Panagopoulos, Richard H. Gould, Edmundo Reyes, John D. Boniface, Ivan L. Berry, III +1 more | 2018-12-11 |
| 10128116 | Integrated direct dielectric and metal deposition | William T. Lee, David Charles Smith, Michal Danek, Patrick A. Van Cleemput, Ramesh Chandrasekharan | 2018-11-13 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Jun Qian, Frank L. Pasquale | 2018-08-28 |
| 10049921 | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor | Nerissa Draeger, Kaihan Ashtiani, Deenesh Padhi, Derek Wong, George Andrew Antonelli +3 more | 2018-08-14 |
| 10037905 | UV and reducing treatment for K recovery and surface clean in semiconductor processing | Bhadri N. Varadarajan, George Andrew Antonelli | 2018-07-31 |
| 10002787 | Staircase encapsulation in 3D NAND fabrication | Yongsik Yu, Nagraj Shankar, Bhadri N. Varadarajan | 2018-06-19 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Jun Qian, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2018-05-08 |
| 9966255 | Method of densifying films in semiconductor device | Wei Tang | 2018-05-08 |
| 9875891 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Shane Tang, Karl Leeser | 2018-01-23 |