Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141505 | Bromine containing silicon precursors for encapsulation layers | — | 2018-11-27 |
| 10043656 | Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide | David Charles Smith | 2018-08-07 |
| 10043655 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Pramod Subramonium, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2018-08-07 |
| 9996004 | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks | David Charles Smith | 2018-06-12 |
| 9911595 | Selective growth of silicon nitride | David Charles Smith | 2018-03-06 |
| 9905414 | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Roy G. Gordon, Jill S. Becker, Seigi Suh | 2018-02-27 |
| 9875891 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Bart J. van Schravendijk, Shane Tang, Karl Leeser | 2018-01-23 |
| 9873946 | Multi-station sequential curing of dielectric films | Jason Dirk Haverkamp, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin, Eugene Smargiassi +1 more | 2018-01-23 |
| 9865815 | Bromine containing silicon precursors for encapsulation layers | — | 2018-01-09 |
| 9859153 | Deposition of aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Kapu Sirish Reddy | 2018-01-02 |