Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128116 | Integrated direct dielectric and metal deposition | William T. Lee, Bart J. van Schravendijk, Michal Danek, Patrick A. Van Cleemput, Ramesh Chandrasekharan | 2018-11-13 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 10043656 | Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide | Dennis M. Hausmann | 2018-08-07 |
| 9996004 | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks | Dennis M. Hausmann | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2018-05-08 |
| 9911595 | Selective growth of silicon nitride | Dennis M. Hausmann | 2018-03-06 |