Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale, Jun Qian +5 more | 2018-10-16 |
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Ishtak Karim, Fung Suong Ou | 2018-10-09 |
| 10008428 | Methods for depositing films on sensitive substrates | Shankar Swaminathan, Adrien LaVoie, Jon Henri | 2018-06-26 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Purushottam Kumar, Chloe Baldasseroni, Heather Landis, Andrew Duvall +11 more | 2018-05-15 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Adrien LaVoie, Deenesh Padhi +1 more | 2018-05-08 |
| 9899195 | Systems and methods for removing particles from a substrate processing chamber using RF plasma cycling and purging | Adrien LaVoie | 2018-02-20 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Ishtak Karim, Purushottam Kumar, Jun Qian, Ramesh Chandrasekharan, Adrien LaVoie | 2018-01-16 |