Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157755 | Purge and pumping structures arranged beneath substrate plane to reduce defects | Shankar Swaminathan, Adrien LaVoie | 2018-12-18 |
| 10128116 | Integrated direct dielectric and metal deposition | William T. Lee, Bart J. van Schravendijk, David Charles Smith, Michal Danek, Patrick A. Van Cleemput | 2018-11-13 |
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Edward Augustyniak +1 more | 2018-11-13 |
| 10020188 | Method for depositing ALD films using halide-based precursors | James S. Sims, Jon Henri, Andrew John McKerrow, Seshasayee Varadarajan, Kathryn M. Kelchner | 2018-07-10 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Ishtak Karim, Yukinori Sakiyama, Yaswanth Rangineni, Edward Augustyniak, Douglas Keil +2 more | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Hu Kang, Ishtak Karim, Purushottam Kumar, Jun Qian, Adrien LaVoie | 2018-01-16 |