Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145010 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Karl Leeser, Adrien LaVoie | 2018-12-04 |
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2018-11-13 |
| 10043690 | Fault detection using showerhead voltage variation | Sunil Kapoor, Aaron Bingham, Tuan Nguyen | 2018-08-07 |
| 10044338 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2018-08-07 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Ishtak Karim, Yukinori Sakiyama, Edward Augustyniak, Douglas Keil, Ramesh Chandrasekharan +2 more | 2018-06-12 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2018-04-10 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2018-01-23 |