Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077497 | Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate | Edward Augustyniak | 2018-09-18 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2018-01-23 |