| 10145010 |
Multi-station plasma reactor with RF balancing |
Karl Leeser, Adrien LaVoie, Yaswanth Rangineni |
2018-12-04 |
| 10043636 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal |
Hyungjoon Kim, Karl Leeser, Vince Burkhart |
2018-08-07 |
| 10043690 |
Fault detection using showerhead voltage variation |
Yaswanth Rangineni, Aaron Bingham, Tuan Nguyen |
2018-08-07 |
| 10044338 |
Mutually induced filters |
Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser |
2018-08-07 |
| 9954508 |
Multiple-output radiofrequency matching module and associated methods |
Karl Leeser, Bradford J. Lyndaker |
2018-04-24 |
| 9875883 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching |
Yukinori Sakiyama, Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak |
2018-01-23 |
