Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020188 | Method for depositing ALD films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Kathryn M. Kelchner | 2018-07-10 |