Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020188 | Method for depositing ALD films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Seshasayee Varadarajan | 2018-07-10 |
| 9917422 | Semi-polar III-nitride optoelectronic devices on M-plane substrates with miscuts less than +/− 15 degrees in the C-direction | Po Shan Hsu, Robert M. Farrell, Daniel Arthur Haeger, Hiroaki Ohta, Anurag Tyagi +3 more | 2018-03-13 |
| 9865455 | Nitride film formed by plasma-enhanced and thermal atomic layer deposition process | James S. Sims | 2018-01-09 |